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Virtual Event

Huawei Webinar: Atomic Layer Deposition

May 12, 20227:00am to 10:00am

Please join us for this NanoCanada webinar where we will feature Canadian researchers who are working on Atomic Layer Deposition or Etching from various perspectives, including the selection and design of precursor materials or the process itself and its simulation. The webinar is presented in partnership with Huawei Canada.

Agenda (MDT)

7:00am-7:05am MDT

Introductory Remarks
Marie D’Iorio, NanoCanada, President

7:05am-7:35am MDT

Atomic Layer Deposition and Molecular Layer Deposition for Next Generation Battery Application
Yang Zhao, Western University, Assistant Professor

7:35am-7:45am MDT

Q&A

7:45am-8:15am MDT

Pre-recorded talk: Metals by Atomic Layer Deposition: Strategies and Surface Chemistry
Sean Barry, Carleton University, Professor

8:15am-8:45am MDT

Atomic Layer Deposition for Fuel Cell, Battery and Sensor Applications
Shuhui Sun, Institut National de la Recherche Scientifique (INRS), Professor

8:45am-8:55am MDT

Q&A

8:55am-9:25am MDT

Pre-recorded talk: Scalable, high-throughput spatial atomic layer deposition at the University of Waterloo
Kevin Musselman, University of Waterloo, Associate Professor

9:25am-9:55am MDT

Canadian Options for ALD Equipment
Andranik Sarkissian, Plasmionique Inc., President and CTO – AND – K. Scott Butcher, Meaglow Ltd., Chief Scientist

9:55am-10:05am MDT

Q&A

10:05am MDT

Closing Remarks

Speakers

Kevin Musselman
Kevin Musselman

Dr. Musselman is an Associate Professor in the Department of Mechanical and Mechatronics Engineering at the University of Waterloo. He received his doctoral and postdoctoral training at the University of Cambridge then joined the University of Waterloo in 2015, where he leads the Functional Nanomaterials research group. His research program focuses on the scalable synthesis of nanomaterials and using these materials to drive the understanding and development of next-generation functional coatings and devices. Dr. Musselman has helped pioneer the integration of metal-oxide thin films made by spatial atomic layer deposition into a variety of applications, including solar cells, LEDs, memristive devices, quantum-tunneling metal-insulator-metal diodes, and gas sensors. A spatial-atomic-layer-deposition company, Nfinite Nanotechnology, was spun off from his lab to commercialise barrier coatings for sustainable packaging. Dr. Musselman has also developed laser-processed 2D nanoparticles for applications in solar cells, cancer theranostics, and chemical sensing. He has published over 70 papers on these topics.

Dr. Yang Zhao
Dr. Yang Zhao

Dr. Yang Zhao is currently an Assistant Professor in the Department of Mechanical and Materials Engineering at the University of Western Ontario. He obtained his Ph.D. degree at Western University in Dec 2018. Then, he had his postdoc training at Western and Lawrence Berkeley National Laboratory in 2019-2020. Dr. Zhao’s research focuses on the development of advanced nanomaterials and nanotechnology for next-generation energy storage devices, as well as the advanced characterization techniques for mechanism understanding. Dr. Zhao has already published over 130 journal articles in peer-reviewed journals and his works have received high citations of over 8400 times and his personal H-index is 47. He has been listed as the World’s Top 2% Scientists 2019, 2020 – Stanford University Releases List. He is also an editorial board member of Frontiers in Materials, Materials Today Energy and ALDiJ.

Dr. Shuhui Sun
Dr. Shuhui Sun

Dr. Shuhui Sun is a Full Professor at the Institut National de la Recherche Scientifique (INRS), center for Energy, Materials, and Telecommunications (Montréal, Canada). He is a member of the College of Royal Society of Canada, member of the Global Young Academy, Vice President of the International Academy of Electrochemical Energy Science (IAOEES). His research interests focus on Nanomaterials for Energy Conversion and Storage applications, including H2 fuel cells, hydrogen production, lithium batteries, metal-air batteries, Na-ion/Zn-ion batteries, CO2 reduction, and sensors, etc. He has published over 260 peer-reviewed articles in top journals, including Nature Communications, Energy & Environmental Science, Advanced Materials, Advanced Energy Materials, J. Am. Chem. Soc., Angew. Chem, etc. He is among the world’s top 2% scientists (career-long). He has edited 4 books and 16 book chapters and holds 5 US patents. He serves as the Executive Editor-in-Chief of Electrochemical Energy Reviews (IF=28.9), Associate Editor of SusMat, and editorial board member of over 10 scientific journals.

Seán Barry
Seán Barry

Seán Barry is a Full Professor at Carleton University, Ottawa, Canada), where he works on precursor design and surface mechanisms for atomic layer deposition (ALD).

Seán is the director of the Facility for Nanoscience, Surfaces, and Sensor Interfaces (FANSSI) at Carleton, which was commissioned in 2015 by a $1.9M Canadian infrastructure grant to study surface chemistry and ALD. He is recognized as a world expert in metal ALD and precursor design. He has long-standing and extensive industrial collaborations in ALD with over 100 papers and patents in ALD precursor and process design:4 of the patents were established while an independent researcher at Carleton.

He has served as a scientific advisor for the AVS ALD, Baltic ALD and EuroCVD meetings, and has chaired the AVS ALD 2021 meeting (virtual), and will chair the upcoming AVS ALD 2023 conference in Bellevue, WA. He recently wrote a textbook entitled “The Chemistry of Atomic Layer Deposition”, in 2022.

Dr. Andranik Sarkissian
Dr. Andranik Sarkissian

Dr. Andranik Sarkissian is the president and CTO of PLASMIONIQUE Inc, a Canadian company specialized in design and fabrication of Plasma, Vacuum and Laser based systems for Advanced Surface Engineering and Nanomaterials Synthesis. Prior to founding PLASMIONIQUE in 1999, Dr. Sarkissian was an associate professor at Institut national de la recherche scientifique, division of énergie et matériaux (INRS-EM), and a scientific member of the Canadian Center for Magnetic Fusion. He is an accredited Professional Physicist, an active member of Canadian Association of Physicists, where he also served as director of Corporate Members for two terms, a board member of Fusion Energy Council of Canada, a member of the scientific advisory team of NSERC Green Surface Engineering and Advanced Manufacturing (Green SEAM) Network, and is one of the seven members of the International Union of Pure and Applied Physics’ (IUPAP) working group WG-16, on “Physics in Industry”. Dr. Sarkissian has been author and co-author of numerous scientific publications on topics related to plasma instabilities and diagnostics, surface engineering of biomaterials, and applications of thin films and synthesis of nanostructured materials.

Dr. K. Scott Butcher
Dr. K. Scott Butcher

Dr. K. Scott Butcher is the Chief Scientist of Meaglow Ltd, he received his PhD from Macquarie University in Australia in 1997 and remains an Honorary Senior Research Fellow of that institute from which he founded the public company, BluGlass Ltd. He is the author of over a 100 refereed papers in the areas of nitride semiconductors, materials growth and analysis, semiconductor radiation detectors, nanomaterials, plasma physics, and biomedicine. Having moved back to Canada in 2009, he is the inventor of Meaglow’s hollow cathode gas plasma technology and holds several patents. The plasma source technology that Dr. Butcher developed has been widely adopted for plasma based atomic layer deposition, almost 80 units have now been sold in thirteen separate countries. Dr. Butcher has been involved in four previous start-up companies and has designed and built more than 18 advanced material deposition systems for academia and industry, including ALD systems.

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